000
00304nam a2200121Ia 4500
008
161121s9999 xx 000 0 und d
100
_a
Lyshevski (Sergey Edward)
245
0
_a
Nano and Micro Electromechanical systems
260
_c
CRC Press, Boca Raton
365
_b
0
650
_a
NIL
942
_c
BK
999
_c
107517
_d
107517