000 | 00567nam a2200253Ia 4500 | ||
---|---|---|---|
008 | 161121s9999 xx 000 0 und d | ||
020 | _a978-81-8489-413-4 | ||
041 | _aENGLISH | ||
082 | _aD9:(C) Q10 | ||
100 | _aBRODIE(IVOR) | ||
245 | 4 | _aThe hysics of Micro/Nano-Fabrication | |
260 | _c2010 | ||
260 | _cSpringer -Verlag,New York | ||
300 | _a1-649 | ||
300 | _b20 | ||
300 | _fPaper | ||
365 | _b1195 | ||
365 | _dRuppes | ||
366 | _ePURCHASE | ||
563 | _aPaper Back | ||
590 | _aUG | ||
650 | _aNanoscience | ||
942 | _cBK | ||
999 |
_c68658 _d68658 |