000 00567nam a2200253Ia 4500
008 161121s9999 xx 000 0 und d
020 _a978-81-8489-413-4
041 _aENGLISH
082 _aD9:(C) Q10
100 _aBRODIE(IVOR)
245 4 _aThe hysics of Micro/Nano-Fabrication
260 _c2010
260 _cSpringer -Verlag,New York
300 _a1-649
300 _b20
300 _fPaper
365 _b1195
365 _dRuppes
366 _ePURCHASE
563 _aPaper Back
590 _aUG
650 _aNanoscience
942 _cBK
999 _c68658
_d68658